Processing Resources

CORE partners with facilities at the University of Maine that provide access to equipment and services related to prototyping, device fabrication, and media production.  See below for more information on the Microfabrication Cleanroom Facility and the Innovative Media, Research and Commercialization (IMRC) Center.

Microfabrication Cleanroom Facility

Cleanroom at a glance

The Microfabrication Cleanroom, a part of the Frontier Institute for Research in Sensor Technologies (FIRST) research center, is a 3500 ftclass 1000 cleanroom that maintains dedicated instrumentation for micro- and nano-fabrication of microsensor technologies, and for atomic-scale materials synthesis research.  

Cleanroom Technical Services

  • Microlithography: Mask Aligners, Photoresist Spinners, Vapor Primer, Photoresist Asher, Laser Lithography and Machining,  Pattern Generator
  • Thin Film Deposition: Electron Beam Evaporators, RF and Pulsed DC Sputter Deposition Systems, Plasma-Enhanced Chemical Vapor Deposition, Paralyne Coater, Atomic Layer Deposition
  • Characterization: Surface Profilometer, Spectroscopic Ellipsometer;  
  • Dry Etch: Deep Reactive Ion Etching (DRIE), Reactive Ion Etching (RIE)
  • Wet Etch:  Spin/Rinse/Dry, RCA Clean, KOH Etch, Solvent Benches
  • Thermal Processing:   Four Stack Diffusion Furnaces, Rapid Thermal Annealing, Controlled Atmosphere Furnaces

Cleanroom Contacts:

Innovative Media, Research and Commercialization Center (IMRC Center)

IMRC at a glance

The IMRC Center provides access to high-performance research, design, media production, and prototyping tools and state of the art workspaces, as well as in-house technical support and training for members of the University of Maine and the surrounding region.

IMRC Technical Services

  • Material cutting / shaping with the laser or CNC equipment
  • Digital output and printing
  • One-on-one instruction
  • Audio recording and post production
  • Video editing and post production
  • Product testing
  • Performances and presentation technical support
  • Exhibitions and trade shows
  • Targeted workshops
  • Events and Presentations in the APPE space

IMRC Contacts: