Microfabrication Cleanroom Facility

Facility Information

The Microfabrication Cleanroom is a 3500 ft2class 1000 clean room that maintains dedicated instrumentation for micro- and nano-fabrication of microsensor technologies, and for atomic-scale materials synthesis research.  This is a state-of-the-art nanotechnology facility that is part of the Frontier Institute for Research in Sensor Technologies (FIRST) research center, and is located in the Engineering Science Research Building. Cleanroom Contacts: Michael Call, Research Engineer Phone: 207.581.3382 Email: michael.call@maine.eduGeorge Bernhardt, Research Scientist Phone: 207.581.3381 Email: georgeb@maine.edu

Technical Services

  • Microlithography: Mask Aligners, Photoresist Spinners, Vapor Primer, Photoresist Asher, Laser Lithography and Machining System, Pattern Generator
  • Thin Film Deposition: Electron Beam Evaporators, RF and Pulsed DC Sputter Deposition Systems, Plasma-Enhanced Chemical Vapor Deposition, Paralyne Coater, Atomic Layer Deposition
  • Characterization: Surface Profilometer, Spectroscopic Ellipsometer;  
  • Dry Etch: Deep Reactive Ion Etching (DRIE), Reactive Ion Etching (RIE)
  • Wet Etch:  Spin/Rinse/Dry, RCA Clean, KOH Etch, Solvent Benches
  • Thermal Processing:   Four Stack Diffusion Furnaces, Rapid Thermal Annealing, Controlled Atmosphere Furnaces

Innovative Media, Research and Commercialization Center (IMRC Center)

Facility Information

In addition to general support, workforce training, and workshops, the IMRC provides a full range of specialty services for individual, groups and businesses. The services are provided on a fee basis and vary depending of the nature and length of the service, work or event. IMRC Contacts: Ali Abedi, IMRC Director Email: ali.abedi@maine.eduSean Taylor, Project Manager, Fabrication & Prototyping Technician Phone: 207.581.4660 Email: sean.taylor@maine.edu

Technical Services

  • Material cutting / shaping with the laser or CNC equipment
  • Digital output and printing
  • One-on-one instruction
  • Audio recording and post production
  • Video editing and post production
  • Product testing
  • Performances and presentation technical support
  • Exhibitions and trade shows
  • Targeted workshops
  • Events and Presentations in the APPE space