Processing Resources

CORE partners with facilities at the University of Maine that provide access to equipment and services related to prototyping, device fabrication, and media production. See below for more information on the Microfabrication Cleanroom Facility and the Innovative Media, Research and Commercialization (IMRC) Center.

Microfabrication Cleanroom Facility

Cleanroom at a glance

The CORE Microfabrication Cleanroom is a 3500 ft²class 1000 cleanroom that maintains dedicated instrumentation for micro- and nano-fabrication of microsensor technologies, and for atomic-scale materials synthesis research.

CORE staff work closely with the Frontier Institute for Research in Sensor Technologies (FIRST) research center to support research, learning, and development.

Cleanroom Technical Services

Microlithography: Mask Aligners, Photoresist Spinners, Vapor Primer, Photoresist Asher, Laser Lithography and Machining, Pattern Generator
Thin Film Deposition: Electron Beam Evaporators, RF and Pulsed DC Sputter Deposition Systems, Plasma-Enhanced Chemical Vapor Deposition, Paralyne Coater, Atomic Layer Deposition
Characterization: Surface Profilometer, Spectroscopic Ellipsometer;
Dry Etch: Deep Reactive Ion Etching (DRIE), Reactive Ion Etching (RIE)
Wet Etch: Spin/Rinse/Dry, RCA Clean, KOH Etch, Solvent Benches
Thermal Processing: Four Stack Diffusion Furnaces, Rapid Thermal Annealing, Controlled Atmosphere Furnaces

See a complete listing of the Cleanroom equipment and service rates, Schedule your next service request, Manage your iLab account

View transcript of this video.

Cleanroom contact

Henry Carfagno, Research Facilities Operational Specialist
Phone: 207.581.3382, Email: henry.carfagno@maine.edu

Cleanroom service rates

Internal/Federal Rates

Other Academic Institution Rates

External Rates

Innovative Media, Research and Commercialization Center (IMRC Center)

IMRC Center at a glance

The IMRC Center provides access to high-performance research, design, media production, and prototyping tools and state of the art workspaces, as well as in-house technical support and training for members of the University of Maine and the surrounding region.