Microfabrication Cleanroom Facility

Cleanroom at a glance

The Microfabrication Cleanroom, a part of the Frontier Institute for Research in Sensor Technologies (FIRST) research center, is a 3500 ftclass 1000 cleanroom that maintains dedicated instrumentation for micro- and nano-fabrication of microsensor technologies, and for atomic-scale materials synthesis research.  

Cleanroom Technical Services

  • Microlithography: Mask Aligners, Photoresist Spinners, Vapor Primer, Photoresist Asher, Laser Lithography and Machining,  Pattern Generator
  • Thin Film Deposition: Electron Beam Evaporators, RF and Pulsed DC Sputter Deposition Systems, Plasma-Enhanced Chemical Vapor Deposition, Paralyne Coater, Atomic Layer Deposition
  • Characterization: Surface Profilometer, Spectroscopic Ellipsometer;  
  • Dry Etch: Deep Reactive Ion Etching (DRIE), Reactive Ion Etching (RIE)
  • Wet Etch:  Spin/Rinse/Dry, RCA Clean, KOH Etch, Solvent Benches
  • Thermal Processing:   Four Stack Diffusion Furnaces, Rapid Thermal Annealing, Controlled Atmosphere Furnaces

Cleanroom Contacts: