MicroInstruments & Systems Laboratory
Dry Etch, Thin Film Deposition, Wet Processing, Chemical Vapor Deposition,
Photomask Generator, Photolithography, MEMS Testing Laboratory
The MicroInstruments ad Systems Laboratory (MISL) is a multi-disciplinary laboratory within FIRST dedicated to providing custom, prototype, micro instruments to the general research community. The micro instruments are developed in a synergistic collaboration to enhance and facilitate specific research missions within each discipline or program. MISL currently supports and/or supplies micro instrumentation to researchers in molecular biology, dermatology, oceanography, aerospace, genetics/proteomics, entomology, civil engineering, optics, materials science, chemistry, NMR/MRI, FTIR spectrometery, MALDI, and nuclear physics.